Container and liner thereof

ABSTRACT

A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is disposed on a surface of the bottom cover so that when the bottom cover is tightly combined with the top cover, the locators are clipped between the bottom cover and the top cover to orient the canopy in a fixed position.

CROSS-REFERENCES TO RELATED APPLICATIONS

The current application is a continuation of U.S. Ser. No. 12/187,491,filed on U.S. Pat. No. 7,975,848, a priority to Taiwan PatentApplication No. 096213180, filed Aug. 10, 2007, and the contents ofpriority-claimed applications are hereby incorporated by reference intheir entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a container and, more particularly, toa canopy in a container and a method of orienting the canopy in a fixedposition.

2. Description of the Prior Art

Semiconductor technologies have developed rapidly in the past fewdecades, wherein optical lithography plays a critical role. Opticallithography is depended upon wherever a pattern needs to be defined.

When optical lithography is applied to semiconductors, a designedpattern is first made into a light-transmitting reticle having aparticular shape. Then, a light source is projected through the reticleonto a silicon wafer to reveal a particular pattern by exposure. Thereticle used for generating a pattern must be clean absolutely becauseany particles attached to the reticle (such as particles, powder dusts,or organic matters) will impair the quality of imaging throughprojection. Therefore, a clean room is always necessary for generalwafer processes to prevent contamination by airborne particles. However,the clean rooms nowadays can not achieve an absolutely dust-freestandard.

Anti-contamination reticle pods are hence used in modern semiconductorprocesses for storing and transporting reticles in order to maintain thereticle cleaning process.

A conventional reticle pod is usually made of a macromolecular material.This kind of material provides such advantages as molding easily, lowcost, and transparent. While this kind of material has a high electricresistance and is therefore nonconductive, it tends to generate staticelectricity from friction or general handling. Particularly in a cleanroom where humidity must be kept at a low level, electric charge can bevery easily generated and accumulated on the reticle made of suchmaterial. Electrostatic charge on a surface of a reticle will attractparticulate pollutants in the air or even result in an electrostaticdischarge (ESD) from metal lines on the reticle. Once the staticelectricity discharge, a transient current is generated and may producesparks or arcs. A strong current and a high temperature accompanying thesparks or arcs will eventually oxidize and melt the metal lines, therebychanging the pattern on the reticle.

Presently there are many solutions to the problems associated withelectrostatic discharge. First of all is to improve the workingenvironment, such as maintaining an appropriate humidity in the air,equipping operators with clothes having a grounding effect, or using ionfans to remove static electricity in the environment. However, theworking environment may be changed by a plurality of unpredictablefactors, so that it is impossible to completely prevent a reticle frombeing damaged by static electricity.

Another approach is to change the material of the reticle pod. Forexample, U.S. Pat. No. 6,513,654 disclosed a reticle support structurewith a grounding function, in which the reticle support structure canrelease electrostatic charge on a reticle when a reticle pod is incontact with a matching table. As another example, U.S. Pat. No.6,247,599 disclosed a conductive plate is disposed on the chassis orcanopy of a reticle pod to reduce the accumulation of electric charge.While the method of adding an electrically conductive chassis has beenwidely adopted, the canopy and the chassis are positioned mainly byscrews, which becomes a contamination source during a screwing processbecause the friction in the screwing process will generate particles andthus causes the contamination.

In view of the above, the present invention aims to improve theshortcomings of prior art reticle pods by providing a reticle poddisclosed herein.

SUMMARY OF THE INVENTION

A primary objective of the present invention is to provide a containerand a canopy thereof, wherein the canopy is positioned without usingscrews to prevent the particle from being generated and thereby reducethe contamination.

A second objective of the present invention is to provide a containerand a canopy thereof for preventing electric charge from accumulatingand thereby protecting a reticle from being damaged by staticelectricity.

A third objective of the present invention is to provide a canopy in acontainer, and the canopy can be disposed in the container withoutchanging an original structure of the container.

To achieve these ends, the present invention provides a containercomprising a top cover and a bottom cover. The container further has acanopy disposed on the bottom cover for forming therewith a space toaccommodate an article. A plurality of locators is mounted around theperiphery of the canopy, so that when the bottom cover is tightlycombined with the top cover, the plurality of locators is sandwiched inbetween the bottom cover and the top cover to orient the canopy in afixed position.

The present invention also provides a container that having a top coverand a bottom cover, in which a wall is disposed on the surface thatfacing the top cover. The container further includes a canopy thatdisposed on the bottom cover for forming therewith a space toaccommodate an article. A plurality of locators pressed against the walland is mounted around the periphery of the canopy to orient the canopyin a fixed position.

The present invention further provides a container having a top coverand a bottom cover, and the top cover and the bottom cover constructedan internal space therein. The container further includes a chassis thatdisposed on a surface of the bottom cover facing the internal spacewhile at least a wall is disposed on the surface thereof facing theinternal space. The container also includes a canopy disposed on thechassis for forming therewith a space to accommodate an article. Aplurality of locators pressed against the wall and is mounted around theperiphery of the canopy to orient the canopy in a fixed position.

The present invention further provides a canopy for being disposed in acontainer, in which the container includes a top cover and a bottomcover, and at least a wall disposed on the surface of the bottom coverthat facing the top cover. A plurality of locators pressed against thewall and is mounted around the periphery of the canopy to orient thecanopy in a fixed position.

The present invention further provides a canopy for being disposed in acontainer, in which the container includes a top cover and a bottomcover, and a chassis is disposed on the surface of the bottom coverfacing the top cover, in which a wall is disposed on the surface of thechassis facing the top cover. A plurality of locators to press againstthe wall on the chassis is mounted on the around of the canopy to orientthe canopy in a fixed position.

In summary, the present invention provides a novel design that is notonly serves to orient a canopy in a fixed position without using screws,but also prevent the particles from being generated and thereby reducethe contamination. The canopy made of an electrically conductivematerial, which can protect an article that stored therein from beingdamaged by static electricity. Moreover, the present invention can beapplied to the reticle pods nowadays without changing the originaldesigns of the reticle pods.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention as well as a preferred mode of use, further objectives andadvantages thereof will best be understood by reference to the followingdetailed description of illustrative embodiments when read inconjunction with the accompanying drawings, wherein:

FIG. 1A is a cross-sectional exploded view of a container according to afirst preferred embodiment of the present invention;

FIG. 1B is a cross-sectional assembled view of the container accordingto the first preferred embodiment of the present invention;

FIG. 2 is a perspective structural drawing of a locator according to asecond preferred embodiment of the present invention;

FIG. 3A is a cross-sectional assembled view of a container according toa third preferred embodiment of the present invention;

FIG. 3B is a cross-sectional exploded view of the container according tothe third preferred embodiment of the present invention;

FIG. 4A is a perspective structural drawing of a locator according to afourth preferred embodiment of the present invention; and

FIG. 4B is another perspective structural drawing of the locatoraccording to the fourth preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

While the present invention is described below as applied to a containerfor use with semiconductors, the scope of the present inventionencompasses all the applications where cleanness and a sealed conditionare required, such as the medical and therapeutic equipments,biochemical devices or optical instruments. In addition, in the presentinvention the basic components as well as their structures and themechanic principles involved that can be readily understood by a personof ordinary skill in the pertinent art will not be further explainedherein. Moreover, the drawings referred to below are intended todemonstrate only schematically structures related to features of thepresent invention. The drawings are therefore not, and unnecessary tobe, drawn according to actual dimensions.

According to a first embodiment of the present invention, FIGS. 1A and1B illustrate a container 100 for storing or transporting an article,such as a reticle pod or a single-reticle SMIF-pod for use withsemiconductors. The container 100 includes a top cover 102 and a bottomcover 104, and the top cover 102 and the bottom cover 104 constructed aninternal space 106 therein. In this embodiment, the container 100 isreticle pod. The container 100 further includes a canopy 110 disposed onthe bottom cover 104, so that the canopy 110 and the bottom cover 104constructed a space to accommodate a reticle 10.

A plurality of locators 120 is disposed around the periphery of thecanopy 110, and the plurality of locators 120 can be mounted on thecanopy 110 by riveting, welding or screwing. The shaped of locator 120is L-shaped and usually mounted at four corners of the canopy 110. Whenthe top cover 102 is tightly combined with the bottom cover 104, theends of each said L-shaped locator 120 will be sandwiched in between thebottom cover 104 and the top cover 102 to orient the canopy 110 in afixed position. Therefore, the canopy 110 would not be moved during thecontainer 100 is conveyed.

The bottom cover 104 can further include a chassis 112 on its surfaceand face toward the internal space 106, so that a shielding effect canagainst the static electricity when the top cover 110 and/or the chassis112 are made of a metal or other electrically conductive materials.

According to a second preferred embodiment of the present invention, asshown in FIG. 2, the bottom cover 104 includes at least one wall 114disposed on the surface of the bottom cover 104 that facing the internalspace 106, while the canopy 110 includes a plurality of locators 122mounted on the periphery of the canopy 110. The shaped of each thelocators 122 are substantially L-shaped and a bent portion is located atthe corner of the L-shaped locators 122 for pressing against the wall114 to orient the canopy 110 in a fixed position. When all the locators122 pressed against the wall 114, the range of horizontal movement ofthe canopy 110 is restricted, so that the canopy 110 would not be tiltedor moved during the container 100 is conveyed.

Alternatively, the wall 114 can be disposed on the surface of thechassis 112 and faced toward the internal space 106. The bent portionsat the corners of the L-shaped locators 122 are used to press againstthe wall 114 to orient the canopy 110 in a fixed position.

Referring to FIGS. 3A and 3B, a container 300 for storing ortransporting an article according to a third preferred embodiment. Thereticle pod includes a top cover 302 that having a first opening, aframe 308 disposed at the rim of the first opening, and a bottom cover304 engaged with the frame 308. The top cover 302, the frame 308 and thebottom cover 304 enclosed an internal space 306 therein. The container300 also includes a canopy 310 that disposed in the internal space 306and enclosed the space with the bottom cover 304 to accommodate thereticle 10.

The canopy 310 includes a plurality of locators 320, which can bemounted on the canopy 310 by riveting, welding, or screwing. Thelocators 320 are substantially L-shaped and usually mounted at fourcorners of the canopy 310. When the top cover 302 is tightly combinedwith the frame 308, an end of each said L-shaped locators 320 issandwiched in between the frame 308 and the top cover 302 to orient thecanopy 310 in a fixed position. Therefore, the canopy 310 would not bemoved during the container 300 is conveyed.

The bottom cover 304 includes a chassis 312 that disposed on the surfaceof the bottom cover 304 and faced the internal space 306, so that ashielding effect against the static electricity can be provided when thetop cover 310 and/or the chassis 312 are/is made of a metal or otherelectrically conductive materials.

According to a fourth preferred embodiment of the present invention, asshown in FIGS. 4A and 4B. The frame 308 includes at least one wall 314that disposed on its surface faced toward the internal space 306. Thecanopy 310 is equipped with a plurality of locators 322 that mountedaround the periphery of the canopy 310. Each the plurality of locators322 is L-shaped and a bent portion is located at a corner of the L-shapefor pressing against the wall 314 to orient the canopy 310 in a fixedposition. When the plurality of locators 322 pressed against the wall314, the range of horizontal movement of the canopy 310 is restricted,so that the canopy 310 would not be tilted or moved during the containeris conveyed.

Alternatively, the wall 314 can be mounted on the surface of the bottomcover 304 and faced toward the internal space 306. The bent portions atthe corners of the L-shaped locators 322 are used to press against thiswall 314 to orient the canopy 310 in a fixed position.

The present invention has been described with preferred embodimentsthereof and it is understood that the embodiments are not intended tolimit the scope of the present invention. Moreover, as the contentdisclosed herein should be readily understood and can be implemented bya person skilled in the art, all equivalent changes or modificationswhich do not depart from the spirit of the present invention areencompassed by the appended claims.

1. A container for storing or transporting an article, comprises: a topcover, having a first opening; a frame, disposed at a rim of the firstopening and where at least a wall is disposed on a surface thereoffacing the internal space; a bottom cover, engaged with the frame,wherein the bottom cover, the frame and the top cover form an internalspace; a canopy, disposed in the internal space and the canopy and thebottom cover constructed a space; and a plurality of locators, disposedon the around the periphery of the canopy for pressing against the wallto orient the canopy in a fixed position.
 2. The container according toclaim 1, further comprising a chassis disposed on a surface of thebottom cover and faced toward the internal space.
 3. The containeraccording to claim 1, wherein the chassis is made of an electricallyconductive material.
 4. The container according to claim 1, wherein eachthe locators is L-shaped.
 5. The container according to claim 4, whereineach said L-shaped locators has a first end mounted on the canopy and asecond end sandwiched in between the top cover and the bottom cover.